MEFAS has two scanning Microscopes. A JEOL 6340 field emission digital control system is capable of achieving 12A resolution at 15kev.

Our Hitachi S4500 field emission system with a Noran Vantage energy dispersive spectrometer is capable of detecting elements ranging from boron through uranium. This system is used for secondary electron imaging, backscatter electron imaging, voltage contrast work, as well as contamination and surface analysis.